Igishushanyo mbonera cy'urusobe rw'amafoto rwashyizwe hamwe

Igishushanyo cyafotonikeurusobe rw'itumanaho ruhuriweho

Uduce tw’amafoto twinjijwemo(PIC) akenshi ikorwa hifashishijwe inyandiko z'imibare kubera akamaro k'uburebure bw'inzira muri interferometers cyangwa izindi porogaramu zigira ingaruka ku burebure bw'inzira.PICikorwa hakoreshejwe uburyo bwo gushushanya ibice byinshi (ubusanzwe kuva kuri 10 kugeza kuri 30) kuri wafer, igizwe n'imiterere myinshi ya polygonal, akenshi igaragazwa muri format ya GDSII. Mbere yo kohereza dosiye ku ruganda rwa photomask, ni byiza cyane kuba washobora kwigana PIC kugira ngo urebe neza niba igishushanyo ari cyo. Uburyo bwo gushushanya bugabanyijemo urwego rwinshi: urwego rwo hasi ni electromagnetic electromagnetic (EM) simulation ifite imiterere itatu, aho simulation ikorwa ku rwego rwa sub-wavelength, nubwo imikoranire hagati ya atome mu bikoresho ikorwa ku gipimo cya macroscopic. Uburyo busanzwe burimo finite-difference Time-domain (3D FDTD) na eigenmode expansion (EME). Ubu buryo ni bwo bufite ishingiro, ariko ntibushoboka mu gihe cyose cyo gushushanya PIC. Urwego rukurikiraho ni 2.5-dimensional EM simulation, nka finite-difference beam propagation (FD-BPM). Ubu buryo ni bwo bwihuse cyane, ariko bugabanya ubuziranenge kandi bushobora gukora gusa paraxial propagation kandi ntibushobora gukoreshwa mu kwigana resonators, urugero. Urwego rukurikiraho ni simulation ya 2D EM, nka 2D FDTD na 2D BPM. Izi nazo zihuta, ariko zifite imikorere mike, kuko zidashobora kwigana polarization rotators. Urundi rwego ni simulation ya transmission na/cyangwa scattering matrix. Buri gice kinini gishyirwa ku gice gifite input na output, kandi waveguide ihujwe igabanuka ku gice cyo guhindura no gutinda. Izi simulation zihuta cyane. Ikimenyetso cyo gusohora kiboneka mu gukuba matrix ya transmission n'ikimenyetso cyo kwinjira. Matrix ya scattering (ifite ibintu byitwa S-parameters) ikuba ibimenyetso byo kwinjira n'ibisohoka ku ruhande rumwe kugira ngo ibone ibimenyetso byo kwinjira n'ibisohoka ku rundi ruhande rw'igice. Muri make, matrix ya scattering ikubiyemo reflection imbere muri icyo gice. Matrix ya scattering ikunze kuba nini kabiri ugereranyije na matrix ya transmission muri buri gipimo. Muri make, kuva kuri 3D EM kugeza kuri simulation ya matrix ya scattering/scattering, buri cyiciro cya simulation kigaragaza ihindagurika hagati y'umuvuduko n'ubunyangamugayo, kandi abashushanya bahitamo urwego rukwiye rwa simulation hakurikijwe ibyo bakeneye byihariye kugira ngo barusheho kunoza inzira yo kwemeza igishushanyo.

Ariko, kwishingikiriza ku gusimbuza amashanyarazi ibintu bimwe na bimwe no gukoresha matrix yo gukwirakwiza/gutanga kugira ngo wigane PIC yose ntibitanga icyizere cy’uko igishushanyo mbonera gikwiye neza imbere y’umurongo w’amazi. Urugero, uburebure bw’inzira butabazwe nabi, inzira nyinshi ziyobora amashanyarazi zitabasha gukumira neza uburyo bwo hejuru, cyangwa inzira ebyiri ziyobora amashanyarazi zegeranye cyane bigatuma habaho ibibazo bitunguranye byo guhuza bishobora kutagaragara mu gihe cyo gusimbuza. Kubwibyo, nubwo ibikoresho bigezweho byo gusimbuza bitanga ubushobozi bukomeye bwo kwemeza igishushanyo mbonera, biracyasaba ubushishozi bwinshi no kugenzura neza igishushanyo mbonera, hamwe n’uburambe bufatika n’ubumenyi bwa tekiniki, kugira ngo harebwe neza ko igishushanyo mbonera ari cyiza kandi cyizewe kandi bigabanye ibyago byo gusimbuza amashanyarazi.

Uburyo bwitwa sparse FDTD bwemerera simulation za 3D na 2D FDTD gukorwa neza ku gishushanyo cyuzuye cya PIC kugira ngo byemeze igishushanyo. Nubwo bigoye kuri buri gikoresho cyo kwigana amashanyarazi kwigana PIC nini cyane, sparse FDTD irashobora kwigana agace kanini gaherereyemo. Muri 3D FDTD isanzwe, simulation itangirana no gutangiza ibice bitandatu by'umurima wa electromagnetic mu gipimo runaka cyapimwe. Uko igihe kigenda gihita, igice gishya cy'umurima kibarwa, n'ibindi. Buri ntambwe isaba kubara cyane, bityo bifata igihe kirekire. Muri 3D FDTD isanzwe, aho kubara kuri buri ntambwe kuri buri ngingo y'umurima, urutonde rw'ibice by'umurima rugumaho bishobora guhuza mu buryo bwa teyori n'umurima munini kandi bikabarwa gusa kuri ibyo bice. Kuri buri ntambwe y'igihe, ingingo zegeranye n'ibice by'umurima zongerwaho, mu gihe ibice by'umurima biri munsi y'umupaka runaka w'ingufu biragabanuka. Kuri zimwe mu nyubako, iyi mibare ishobora kuba yihuta cyane kurusha 3D FDTD isanzwe. Ariko, FDTDS nke ntizikora neza iyo zikora ku nyubako zitatanye kuko iki gihe urwego rwazo rukwirakwira cyane, bigatuma urutonde rurerure cyane kandi rugoye gucunga. Ishusho ya 1 igaragaza urugero rw'ishusho ya simulation ya 3D FDTD isa na polarization beam splitter (PBS).

Ishusho ya 1: Ibisubizo byo kwigana bivuye kuri 3D sparse FDTD. (A) ni ishusho yo hejuru y'imiterere irimo kwiganwa, ikaba ari coupler y'icyerekezo. (B) Igaragaza ishusho y'ishusho y'ishusho ikoresheje excitation ya quasi-TE. Ibishushanyo bibiri biri hejuru bigaragaza ishusho yo hejuru y'ibimenyetso bya quasi-TE na quasi-TM, naho ibishushanyo bibiri biri hepfo bigaragaza ishusho ijyanye nayo. (C) Igaragaza ishusho y'ishusho y'ishusho ikoresheje excitation ya quasi-TM.