Ihame n'imiterere y'ubu y'icyuma gipima inkombe (APD photodetector) Igice cya Kabiri

Ihame n'imimerere iriho ubuicyuma gipima imiterere y'inkangu (APD ipima foto) Igice cya Kabiri

2.2 Imiterere ya chip ya APD
Imiterere ya chip ikwiye ni yo shingiro ry’ibikoresho bikora neza cyane. Imiterere y’imiterere ya APD yibanda ahanini ku gihe cya RC gihoraho, gufata imyobo kuri heterojunction, igihe cyo gutwara imodoka mu gace kangiritse n’ibindi. Iterambere ry’imiterere yayo rikurikira:

(1) Imiterere y'ibanze
Imiterere ya APD yoroshye ishingiye kuri PIN photodiode, akarere ka P n'akarere ka N bigizweho dope nyinshi, kandi agace ka N-type cyangwa P-type gatera imbaraga ebyiri kashyirwa mu gace ka P cyangwa agace ka N kegereye kugira ngo hakorwe electron za kabiri n'imyobo ibiri, kugira ngo haboneke ubwiyongere bw'umuyoboro w'ibanze wa photocurrent. Ku bikoresho bya InP series, kubera ko coefficient ya ionization y'imyobo iruta coefficient ya ionization y'imyobo ya electron, agace k'ubwiyongere bwa doping y'ubwoko bwa N gakunze gushyirwa mu gace ka P. Mu bihe byiza, imyobo gusa ni yo ishyirwa mu gace k'ubwiyongere, bityo iyi miterere yitwa structure yateweho imyobo.

(2) Kunywa no kwiyongera biratandukanye
Bitewe n'imiterere y'icyuho kinini cya InP (InP ni 1.35eV na InGaAs ni 0.75eV), InP ikunze gukoreshwa nk'ibikoresho byo gukuraho imiterere y'ikirere na InGaAs nk'ibikoresho byo gushyiramo imiterere y'ikirere.

(3) Imiterere y'uburyo bwo kwinjiza, gushyira ibintu mu gaciro no kwiyongera (SAGM) iratangwa uko bikurikirana.
Muri iki gihe, ibikoresho byinshi bya APD bicuruza bikoresha ibikoresho bya InP/InGaAs, InGaAs nk'urwego rwo kwinjiza, InP munsi y'amashanyarazi menshi (>5x105V/cm) nta gucikagurika, ishobora gukoreshwa nk'ibikoresho byo gukuraho amashanyarazi. Kuri iki gikoresho, imiterere ya APD ni uko inzira y'inkangu ikorwa muri InP yo mu bwoko bwa N bitewe n'igongana ry'imyobo. Ukurikije itandukaniro rinini mu cyuho kiri hagati ya InP na InGaAs, itandukaniro ry'urwego rw'ingufu rya 0.4eV mu gice cy'ingufu rituma imyobo ikorwa mu gice cyo kwinjiza InGaAs ifunganye ku nkombe ya heterojunction mbere yo kugera ku gice cyo kugabanya InP kandi umuvuduko ukagabanuka cyane, bigatuma igihe kirekire cyo gusubiza n'umuvuduko muto w'iyi APD. Iki kibazo gishobora gukemurwa wongeyeho urwego rw'impinduka rwa InGaAsP hagati y'ibikoresho byombi.

(4) Imiterere y'uburyo bwo kwinjiza, gushyiramo imbaraga, gutanga imbaraga no kwiyongera (SAGCM) iratangwa uko bikurikirana.
Kugira ngo hakorwe uburyo amashanyarazi akwirakwira mu gice cyo kwinjizamo ingufu n'igice cyo kwinjiza ingufu, urwego rwo kwinjiza ingufu rushyirwa mu gishushanyo mbonera cy'igikoresho, ibyo bikaba binongera cyane umuvuduko n'uburyo gifatwa neza.

(5) Imiterere ya SAGCM yanonosoye Resonator (RCE)
Mu miterere myiza yavuzwe haruguru y’ibikoresho bisanzwe bipima, tugomba kwemera ko ubugari bw’urwego rwo gushyiramo ingufu ari ikintu kivuguruzanya ku muvuduko w’igikoresho n’ubushobozi bwa quantum. Ubugari bworoshye bw’urwego rwo gushyiramo ingufu bushobora kugabanya igihe cyo gutwara ibikoresho, bityo hashobora kuboneka bandwidth nini. Ariko, icyarimwe, kugira ngo haboneke ubushobozi bwo hejuru bwa quantum, urwego rwo gushyiramo ingufu rugomba kugira ubugari buhagije. Umuti w’iki kibazo ushobora kuba imiterere ya resonant cavity (RCE), ni ukuvuga, Bragg Reflector (DBR) yakozwe hepfo no hejuru y’igikoresho. Indorerwamo ya DBR igizwe n’ubwoko bubiri bw’ibikoresho bifite index yo hasi yo gushyiramo ingufu hamwe n’index yo hejuru yo gushyiramo ingufu, kandi byombi bikura bisimburana, kandi ubugari bwa buri rwego buhura n’uburebure bw’urumuri rw’impanuka 1/4 muri semiconductor. Imiterere ya resonator y’igikoresho ishobora kubahiriza ibisabwa mu muvuduko, ubugari bw’urwego rwo gushyiramo ingufu bushobora gukorwa buto cyane, kandi ubushobozi bwa quantum bwa electron bwiyongera nyuma yo kugaragara inshuro nyinshi.

(6) Imiterere y'umurongo w'impande uhujwe n'inkombe (WG-APD)
Indi nzira yo gukemura ikibazo cy’ingaruka zitandukanye z’ubugari bw’urwego rw’amashanyarazi ku muvuduko w’igikoresho no ku buryo bwa quantum ni ugushyiramo imiterere y’umurongo w’amashanyarazi uhuza impande n’impande. Iyi miterere yinjira mu mucyo uturutse ku ruhande, kubera ko urwego rw’amashanyarazi ari rurerure cyane, biroroshye kubona ubushobozi bwo gukoresha quantum bwinshi, kandi icyarimwe, urwego rw’amashanyarazi rushobora gukorwa ruto cyane, bigabanyiriza igihe cyo gutwara ibicuruzwa. Kubwibyo, iyi miterere ikemura itandukaniro ry’uburyo bandwidth n’ubushobozi bwo gukoresha amashanyarazi ku bunini bw’urwego rw’amashanyarazi, kandi byitezwe ko izagera ku muvuduko wo hejuru no ku buryo bwa quantum bwinshi. Imikorere ya WG-APD yoroshye kurusha iya RCE APD, ikuraho inzira igoye yo gutegura indorerwamo ya DBR. Kubwibyo, irashoboka cyane mu rwego rw’imikorere kandi ikwiriye guhuza ikirere gisanzwe.

3. Umwanzuro
Iterambere ry'inkanguicyuma gipima fotoIbikoresho n'ibikoresho birasuzumwa. Igipimo cya ionization ya electron na hole ku bikoresho bya InP kiri hafi y'icya InAlAs, bigatuma habaho inzira ebyiri z'ibice bibiri by'amashanyarazi, bigatuma igihe cyo kubaka inkombe kirushaho kuba kirekire kandi urusaku rukiyongera. Ugereranyije n'ibikoresho bya InAlAs bisukuye, imiterere y'amazi ya InGaAs (P) /InAlAs na In (Al) GaAs/InAlAs ifite igipimo cyiyongereye cya coefficients ya ionization ya coefficients, bityo imikorere y'urusaku ishobora guhinduka cyane. Ku bijyanye n'imiterere, imiterere ya resonator enhanced (RCE) SAGCM n'imiterere ya waveguide ihuza impande (WG-APD) byarakozwe kugira ngo bikemurwe kutumvikana kw'ingaruka zitandukanye z'ubugari bw'urwego rw'amashanyarazi ku muvuduko w'igikoresho n'ubushobozi bwa quantum. Bitewe n'ubukana bw'iyi nzira, ikoreshwa ryuzuye ry'iyi miterere yombi rigomba kwitabwaho cyane.