Ku bikoresho by'ikoranabuhanga bishingiye kuri silicon, ibikoresho bipima foto bya silicon (Si photodetector)

Ku byuma bipima ikirere bishingiye kuri silicon, ibikoresho bipima ikirere bya silicon

AmafotoGuhindura ibimenyetso by'urumuri mo ibimenyetso by'amashanyarazi, kandi uko igipimo cyo kohereza amakuru gikomeza kwiyongera, ibikoresho bipima urumuri byihuta bihujwe na porogaramu za optoelectronics zishingiye kuri silicon byabaye ingenzi ku bigo bishya by'amakuru n'imiyoboro y'itumanaho. Iyi nkuru izatanga incamake y'ibikoresho bipima urumuri byihuta cyane, hibandwa cyane kuri germanium ishingiye kuri silicon (Ge cyangwa Si photodetector)ibikoresho byo gupima foto bya silikoniku ikoranabuhanga rya optoelectronics rihujwe.

Germanium ni ibikoresho bikurura abantu kubona urumuri rwa infrared hafi ya infrared kuri platforme za silicon kuko ijyanye na CMOS kandi ifite ubushobozi bwo kwinjiza urumuri rwinshi cyane ku bunini bw'urumuri rw'itumanaho. Imiterere ya Ge/Si photodetector ikunze gukoreshwa cyane ni pin diode, aho germanium y'umwimerere iherereye hagati y'uturere twa P-type na N-type.

Imiterere y'igikoresho Ishusho ya 1 igaragaza agapira gasanzwe gahagaze ka Ge cyangwaSi fotodecteurimiterere:

Ibintu by'ingenzi birimo: urwego rufata germanium rukura kuri substrate ya silicon; rukoreshwa mu gukusanya p na n by'ibikoresho bitwara umuriro; guhuza Waveguide kugira ngo urumuri rubone neza.

Gukura kwa Epitaxial: Gukura germanium nziza kuri silikoni biragoye bitewe n'uko lattice idahuye neza ku kigero cya 4.2% hagati y'ibikoresho byombi. Uburyo bwo gukura bw'intambwe ebyiri bukunze gukoreshwa: ubushyuhe buke (300-400°C) n'ubushyuhe bwinshi (hejuru ya 600°C) bwo gushyira germanium mu bushyuhe bwinshi. Ubu buryo bufasha kugenzura ihindagurika ry'imigozi riterwa no kudahuza kwa lattice. Guteranya nyuma yo gukura kuri 800-900°C bigabanya ubucucike bw'ihindagurika ry'imigozi kugeza kuri 10^7 cm^-2. Ibiranga imikorere: Ishusho ya Ge/Si PIN igezweho cyane ishobora kugera kuri: ubushobozi bwo gusubiza, > 0.8A /W kuri 1550 nm; Bandwidth,> 60 GHz; Umuriro wijimye, <1 μA kuri -1 V bias.

Guhuza na platforms za optoelectronics zishingiye kuri silicon

Guhuzaibyuma bipima foto byihuta cyaneHamwe na platifomu za optoelectronics zishingiye kuri silicon, zigira ubushobozi bwo gupima no guhuza ibyuma bigezweho bya optique. Uburyo bubiri bw'ingenzi bwo guhuza ni ubu bukurikira: Guhuza imbere (FEOL), aho icyuma gipima foto na transistor bikorerwa icyarimwe kuri substrate ya silicon bituma habaho gutunganya ubushyuhe bwinshi, ariko bigafata agace ka chip. Guhuza inyuma (BEOL). Ibikoresho bipima foto bikorerwa hejuru y'icyuma kugira ngo birinde kubangamira CMOS, ariko bigarukira ku bushyuhe buke bwo gutunganya.

Ishusho ya 2: Uburyo bwo gusubiza no gukoresha umuvuduko w'icyuma gipima foto cya Ge/Si cyihuta cyane

Porogaramu y'ikigo cy'amakuru

Udukoresho dupima foto twihuta cyane ni ingenzi mu ikoreshwa ry’ikoranabuhanga rigezweho. Porogaramu nyamukuru zirimo: transceivers optique: 100G, 400G n’umuvuduko wo hejuru, hakoreshejwe modulation ya PAM-4; Aicyuma gipima uburebure bw'umurambararo (photodetector) gifite umuvuduko munini(>50 GHz) irakenewe.

Urusobe rw'amashanyarazi rwa optoelectronic rushingiye kuri silicon: guhuza icyuma gipima urumuri hamwe na modulator n'ibindi bice; Moteri nto kandi ikora neza cyane.

Imiterere ikwirakwijwe: guhuza ikoranabuhanga hagati y’ikoranabuhanga rikwirakwijwe, ububiko, n’ububiko; Guteza imbere ikenerwa ry’ibikoresho bipima amashanyarazi kandi bifite ikoranabuhanga rigezweho.

Icyerekezo cy'ejo hazaza

Ahazaza h'ibikoresho bipima ikirere byihuta cyane bya optoelectronic bizagaragaza ibi bikurikira:

Igipimo cy'amakuru kiri hejuru: Guteza imbere ikorwa rya transceivers za 800G na 1.6T; Hakenewe ibyuma bipima amashusho bifite umuvuduko urenze 100 GHz.

Guhuza neza: Guhuza chip imwe y'ibikoresho bya III-V na silikoni; Ikoranabuhanga rigezweho ryo guhuza 3D.

Ibikoresho bishya: Gusuzuma ibikoresho bifite imiterere ibiri (nk'ibishushanyo mbonera) kugira ngo hamenyekane urumuri rwihuta cyane; Itsinda rishya rya IV ry'urumuri runini rwo gutwikira uburebure bw'urumuri.

Porogaramu zitangiye kugaragara: LiDAR n'izindi porogaramu zo gupima zirimo gutera imbere kwa APD; Porogaramu za fotoni za mikoroonde zisaba ibikoresho byo gupima foto bikoresha umurongo munini.

Imashini zipima foto zihuta cyane, cyane cyane imashini zipima foto za Ge cyangwa Si, zabaye ingenzi mu gutumanaho hakoreshejwe silicon ndetse n'itumanaho ry'ikoranabuhanga rigezweho. Iterambere rikomeje mu bikoresho, imiterere y'ibikoresho, n'ikoranabuhanga ryo guhuza ni ingenzi kugira ngo habeho ibyifuzo by'ikoranabuhanga rikomeza kwiyongera mu bigo by'amakuru n'imiyoboro y'itumanaho mu gihe kizaza. Uko uru rwego rukomeza gutera imbere, dushobora kwitega kubona imashini zipima foto zifite bandwidth nyinshi, urusaku ruto, kandi zihuzwa neza n'imiyoboro y'ikoranabuhanga na fotoni.