Kuri silicon ishingiye kuri optoelectronics, silicon Photodetector (Si Photodetector)

Kuri silikoni ishingiye kuri optoelectronics, silicon Photodetector

Amafotohindura ibimenyetso byurumuri mubimenyetso byamashanyarazi, kandi mugihe igipimo cyo kohereza amakuru gikomeje gutera imbere, fotodeteri yihuta yihuta ihujwe na sisitemu ya optoelectronics ishingiye kuri silicon yabaye urufunguzo rwibigo bizakurikiraho hamwe numuyoboro witumanaho. Iyi ngingo izatanga incamake ya fotodeteri yihuta yihuta, hibandwa kuri germanium ishingiye kuri silicon (Ge cyangwa Si Photodetector)amashanyarazi ya siliconkubijyanye na tekinoroji ya optoelectronics.

Germanium ni ibikoresho bikurura hafi yumucyo utagaragara kuri platifike ya silicon kuko ihujwe nibikorwa bya CMOS kandi ifite uburyo bukomeye bwo kwinjirira cyane muburebure bwitumanaho. Imiterere ya Photodetector ya Ge / Si ikunze kugaragara ni pin diode, aho germanium yimbere iba ishyizwe hagati yakarere ka P nubwoko bwa N.

Imiterere yibikoresho Igishushanyo cya 1 cyerekana vertical pin isanzwe Ge cyangwaSi Photodetectorimiterere:

Ibyingenzi byingenzi birimo: germanium ikurura igiti gikura kuri substrate ya silicon; Byakoreshejwe gukusanya p na n imikoranire yabatwara amafaranga; Waveguide guhuza kugirango urumuri rwinjire neza.

Gukura kwa Epitaxial: Gukura germanium yo mu rwego rwo hejuru kuri silicon biragoye kubera 4.2% bidahuye hagati ya bikoresho byombi. Uburyo bwo gukura bwintambwe ebyiri mubusanzwe bukoreshwa: ubushyuhe buke (300-400 ° C) imikurire ya buffer hamwe nubushyuhe bwo hejuru (hejuru ya 600 ° C) gushira kwa germanium. Ubu buryo bufasha kugenzura insimburangingo zatewe no kudahuza lattice. Nyuma yo gukura kwiziritse kuri 800-900 ° C irongera igabanya ubucucike bwimitwe igera kuri cm 10 ^ 7 cm ^ -2. Ibiranga imikorere: Photodetector ya Ge / Si PIN igezweho irashobora kugeraho: kwitabira,> 0.8A / W kuri 1550 nm; Umuyoboro mugari,> 60 GHz; Umuyoboro wijimye, <1 μA kuri -1 V kubogama.

Kwishyira hamwe hamwe na silicon ishingiye kuri optoelectronics

Kwishyira hamwe kwaPhotodetector yihutahamwe na silicon ishingiye kuri optoelectronics platform ituma optique ya optique ihinduranya kandi ihuza. Uburyo bubiri nyamukuru bwo kwishyira hamwe nuburyo bukurikira: Kwishyira hamwe kwimbere (FEOL), aho Photodetector na transistor icyarimwe bikorerwa icyarimwe kuri sisitemu ya silicon yemerera gutunganya ubushyuhe bwinshi, ariko bigafata agace ka chip. Kwishyira hamwe-inyuma (BEOL). Photodetector ikorerwa hejuru yicyuma kugirango wirinde kubangamira CMOS, ariko igarukira kubushyuhe bwo hasi.

Igishushanyo 2: Kwitabira no kwaguka kwihuta cyane ya Photodetector ya Ge / Si

Porogaramu Ikigo

Photodetector yihuta cyane nibintu byingenzi mubisekuru bizaza bya data center ihuza. Porogaramu nyamukuru zirimo: optique ya optique: 100G, 400G nibiciro biri hejuru, ukoresheje modul ya PAM-4; A.umuyoboro mwinshi wa Photodetector(> 50 GHz) irakenewe.

Silicon ishingiye kuri optoelectronic igizwe numuzunguruko: guhuza monolithic ya detector hamwe na modulator nibindi bice; Moteri yoroheje, ikora cyane moteri ya optique.

Ikwirakwizwa ryubwubatsi: guhuza optique hagati yo kubara, kubika, no kubika; Gutwara ibyifuzo byingufu zikoresha ingufu, nini-nini ya Photodetector.

Icyerekezo cy'ejo hazaza

Ejo hazaza hahujwe na optoelectronic yihuta yifotora yerekana inzira zikurikira:

Igipimo cyo hejuru cyamakuru: Gutwara iterambere rya 800G na 1.6T transceiver; Photodetector ifite umurongo urenze 100 GHz irakenewe.

Kunoza kwishyira hamwe: chip imwe ihuza ibikoresho bya III-V na silicon; Ikoranabuhanga rigezweho rya 3D.

Ibikoresho bishya: Gucukumbura ibikoresho-bibiri (nka graphene) kugirango tumenye urumuri rwa ultrafast; Itsinda rishya rya IV rivanze no kwaguka kwizuba.

Porogaramu zivuka: LiDAR nibindi byunvikana bisaba gutwara iterambere rya APD; Porogaramu ya Microwave isaba umurongo muremure wo gufotora.

Ifoto yihuta cyane, cyane cyane Ge cyangwa Si ifotora, babaye umushoferi wingenzi wa silikoni ishingiye kuri optoelectronics hamwe nibisekuruza bizaza. Gukomeza gutera imbere mubikoresho, gushushanya ibikoresho, hamwe na tekinoroji yo guhuza ni ngombwa kugirango uhuze ibyifuzo byiyongera byikigo cya data kizaza hamwe numuyoboro witumanaho. Mugihe umurima ukomeje gutera imbere, turashobora kwitegereza kubona fotodetekeri ifite umuvuduko mwinshi, urusaku rwo hasi, hamwe no guhuza hamwe na elegitoroniki na fotonike.