Silicon Photonics element ikora

Silicon Photonics element ikora

Ibikoresho bifatika bifotora byerekeza cyane cyane kubushake bwateguwe hagati yumucyo nibintu. Ikintu gisanzwe kigizwe na fotonike ni moderi nziza. Byose bya silicon-ishingiyemodulatorzishingiye kuri plasma yubusa itwara. Guhindura umubare wa electron nubusa mubikoresho bya silikoni ukoresheje doping, amashanyarazi cyangwa optique birashobora guhindura indangagaciro zayo zoroshye, inzira yerekanwe muburinganire (1,2) yabonetse muguhuza amakuru yatanzwe na Soref na Bennett kumuraba wa nanometero 1550 . Ugereranije na electron, umwobo utera igice kinini cyibipimo nyabyo kandi bitekereza byerekana impinduka, ni ukuvuga ko zishobora kubyara icyiciro kinini impinduka zimpinduka zatanzwe, bityo reroImashini ya Zehnderna modulators impeta, mubisanzwe birahitamo gukoresha umwobo kugirango ukoreicyiciro.

Ibinyuranyemoderi ya silicon (Si)ubwoko bwerekanwa mu gishushanyo cya 10A. Muri moderi yo gutera inshinge, urumuri ruri muri silicon yimbere muminini yagutse cyane, kandi electroni nu mwobo biraterwa. Nyamara, modulator nkiyi iratinda, mubisanzwe ifite umurongo wa 500 MHz, kubera ko electron nubusa bifata igihe kinini kugirango bisubirane nyuma yo gutera inshinge. Kubwibyo, iyi miterere ikoreshwa kenshi nkibihinduka bya optique (VOA) aho kuba modulator. Muri moderi yabatwara depletion modulator, igice cyumucyo giherereye mumasangano magufi ya pn, kandi ubugari bwa depletion yubusabane bwa pn bwahinduwe numurima wamashanyarazi washyizweho. Modulator irashobora gukora kumuvuduko urenze 50Gb / s, ariko ifite igihombo kinini cyo kwinjiza. Vpil isanzwe ni 2 V-cm. Icyuma cya okiside yicyuma (MOS) (mubyukuri semiconductor-oxide-semiconductor) modulator irimo urwego ruto rwa oxyde murwego rwa pn. Yemerera kwirundanya kwabatwara kimwe no kugabanuka kwabatwara, kwemerera VπL ntoya ya 0.2 V-cm, ariko ifite ibibi byigihombo kinini cya optique hamwe nubushobozi buri hejuru yuburebure. Mubyongeyeho, hariho modulators ya SiGe yamashanyarazi ishingiye kuri SiGe (silicon Germanium alloy) ya bande yimbere. Mubyongeyeho, hariho modulator ya graphene yishingikiriza kuri graphene kugirango ihindurwe hagati yo kwinjiza ibyuma hamwe na insulator zikora neza. Ibi birerekana ubudasa bwimikorere yuburyo butandukanye kugirango ugere ku muvuduko mwinshi, gutakaza-optique ya signal ya modulisiyo.

Igishushanyo 10: (A) Igishushanyo mbonera cyibishushanyo mbonera bitandukanye bya silikoni ishingiye kuri optique ya moderi ya moderi na (B) igishushanyo mbonera cyerekana igishushanyo mbonera cya optique.

Ibyuma byinshi byerekana urumuri rwa silicon byerekanwe mubishusho 10B. Ibikoresho bikurura ni germanium (Ge). Ge ishoboye gukuramo urumuri kumurambararo kugeza kuri microne 1.6. Yerekanwa ibumoso nubucuruzi bwatsinze cyane pin imiterere uyumunsi. Igizwe na P yo mu bwoko bwa dopi silicon aho Ge ikura. Ge na Si bifite aho bihurira na 4%, kandi kugirango hagabanuke dislokisiyo, urwego ruto rwa SiGe rwabanje guhingwa nkurwego rwa buffer. N-ubwoko bwa doping bukorerwa hejuru ya Ge layer. Photodiode yicyuma-semiconductor-icyuma (MSM) irerekanwa hagati, na APD (avalanche Photodetector) irerekanwa iburyo. Agace k'ibiza muri APD gaherereye muri Si, gafite urusaku ruto ugereranije n'akarere ka avalanche mu itsinda rya III-V ibikoresho by'ibanze.

Kugeza ubu, nta gisubizo gifite inyungu zigaragara muguhuza inyungu nziza na fotonike ya silicon. Igicapo 11 cerekana inzira nyinshi zishoboka zateguwe nurwego rwinteko. Ibumoso ibumoso hari monolithic yibumbiye hamwe harimo gukoresha germanium ikuze ya epitaxial (Ge) nkibikoresho byunguka optique, erbium-dope (Er) ibirahuri byerekana ibirahure (nka Al2O3, bisaba kuvoma optique), hamwe na gallium arsenide ikuze cyane (GaAs) Utudomo. Inkingi ikurikiraho ni wafer yo guterana kwa wafer, irimo okiside hamwe nubuhinzi-mwimerere mu itsinda rya III-V ryunguka. Inkingi ikurikira ni chip-to-wafer inteko, ikubiyemo kwinjiza chip ya groupe ya III-V mumwobo wa silicon wafer hanyuma igatunganya imiterere ya waveguide. Ibyiza byubu buryo butatu bwambere ni uko igikoresho gishobora kugeragezwa neza muri wafer mbere yo gukata. Iburyo-byinshi inkingi ni chip-to-chip inteko, harimo guhuza mu buryo butaziguye chipiki ya silicon na chip ya matsinda ya III-V, kimwe no guhuza ukoresheje lens hamwe na gritingi. Icyerekezo cyerekezo cyubucuruzi kigenda kiva iburyo ugana ibumoso bwimbonerahamwe igana ibisubizo byinshi kandi byuzuye.

Igicapo 11: Uburyo inyungu nziza yinjizwa muri fotonike ishingiye kuri silicon. Mugihe wimutse uva ibumoso ugana iburyo, ingingo yo gushiramo ingingo igenda isubira inyuma mubikorwa.