Imashini ipima fotoni imwe yanyuze mu nzitizi ya 80% mu mikorere myiza

Imashini ipima fotoni imwebanyuze mu nzitizi ya 80% mu mikorere myiza

Ifotoni imweicyuma gipima fotozikoreshwa cyane mu bijyanye na quantum photonics na single-photon imaging bitewe n'inyungu zazo nto kandi zihendutse, ariko zihura n'imbogamizi zikurikira mu bya tekiniki.

Inzitizi z'ikoranabuhanga zihari ubu

1. CMOS na SPAD y'amasasu mato: Nubwo bifite uburyo bwo gushyira hamwe cyane kandi bigatuma bidatinda cyane, urwego rwo gushyiramo ibintu ni ruto (mikorometero nke), kandi PDE ni nke mu gace ka infrared gaherereye hafi, aho hafi 32% kuri 850 nm.

2. SPAD y'ubucucike bunini: Ifite urwego rwo kwinjizamo ibintu rufite ubugari bwa mikorometero mirongo. Ibicuruzwa by'ubucuruzi bifite PDE ya hafi 70% kuri 780 nm, ariko kunyuramo 80% biragoye cyane.

3. Inzitizi zo gusoma urusobe rw'amashanyarazi: SPAD y'amahuriro manini isaba voltage irenze 30V kugira ngo habeho amahirwe menshi yo kuzimya inkombe. Nubwo voltage ya 68V yazimwa mu rusobe rusanzwe, PDE ishobora kongerwaho gusa kugeza kuri 75.1%.

Umuti

Kunoza imiterere ya semiconductor ya SPAD. Igishushanyo mbonera cy’urumuri inyuma: Fotoni zibaho zibora cyane muri silicon. Imiterere y’urumuri inyuma ituma fotoni nyinshi zinjira mu gice cyo kwinjizamo, kandi electron zikorwa zigashyirwa mu gace k’urumuri. Kubera ko igipimo cya ionization cya electron muri silicon kiri hejuru kurusha icy’imyobo, gutera electron bitanga amahirwe menshi yo gutera urumuri. Agace k’urumuri gatanga doping: Hakoreshejwe inzira ihoraho yo gukwirakwiza boron na fosifore, doping y’ubujyakuzimu isubizwa kugira ngo ihuze amashanyarazi mu gace k’ubujyakuzimu kadafite inenge nyinshi za kristu, bigabanye neza urusaku nka DCR.

2. Urusobe rw'amajwi rufite imikorere myiza. Kuzimya umuvuduko mwinshi wa 50V Guhinduranya imiterere yihuse; Imikorere myinshi: Mu guhuza ibimenyetso bya FPGA control QUENCHING na RESET, guhinduranya hagati y'imikorere y'ubuntu (signal trigger), gate (external GATE drive), n'uburyo bwa hybrid biragerwaho.

3. Gutegura no gupakira ibikoresho. Uburyo bwo gukoresha SPAD wafer bukoreshwa, hakoreshejwe agapaki k'ikinyugunyugu. SPAD ifatanye na substrate ya AlN ikanashyirwa ku gikoresho gikonjesha gishyuha (TEC), kandi kugenzura ubushyuhe bigerwaho binyuze muri thermistor. Imigozi ya optique ya multimode ihujwe neza n'ikigo cya SPAD kugira ngo igere ku guhuza neza.

4. Gupima imikorere. Gupima byakozwe hakoreshejwe diode ya laser ya picosecond pulsed ya 785 nm (100 kHz) hamwe na converter y'igihe-digital (TDC, resolution ya 10 ps).

Incamake

Mu kunoza imiterere ya SPAD (aho ihurira cyane, aho urumuri rugarukira, aho gukoresha imiti igabanya ubushyuhe) no guhanga udushya uburyo bwo kuzimya bwa 50 V, ubu bushakashatsi bwatumye PDE y'icyuma gipima fotoni imwe gishingiye kuri silicon igera ku burebure bushya bwa 84.4%. Ugereranyije n'ibicuruzwa by'ubucuruzi, imikorere yayo yose yarushijeho kwiyongera, itanga ibisubizo bifatika ku bikorwa nko gutumanaho kwa quantum, kubara kwa quantum, no gufata amashusho y'ubuhanga buhanitse bisaba imikorere myiza cyane no koroshya imikorere. Uyu murimo washyizeho urufatiro rukomeye rwo gukomeza iterambere rya silicon.icyuma gipima fotoni imweikoranabuhanga.