Photodetector imwe-imwe ya fotone yamennye icyuho cya 80%

Phototetector imwebamennye muri 80% gukora neza

Ifoto imwegufotorazikoreshwa cyane mubice bya kwantum fotonike hamwe no gufata amashusho ya fotone imwe kubera inyungu zoroheje kandi zihenze, ariko zihura nibibazo bya tekinike bikurikira.

Imipaka igezweho

1.CMOS na thin-junction SPAD: Nubwo bafite kwishyira hamwe kwinshi hamwe nigihe gito cya jitter, igipimo cyo kwinjiza ni gito (micrometero nkeya), kandi PDE igarukira mukarere kegereye infragre, hamwe na 32% gusa kuri 850 nm.

2. Gufatanya-guhuza SPAD: Igaragaza urwego rwo kwinjiza micrometero icumi z'ubugari. Ibicuruzwa byubucuruzi bifite PDE hafi 70% kuri 780 nm, ariko guca muri 80% biragoye cyane.

3. Ndetse hamwe na voltage yo kuzimya 68V mumuzunguruko gakondo, PDE irashobora kwiyongera kugeza kuri 75.1%.

Igisubizo

Hindura imiterere ya semiconductor ya SPAD. Igishushanyo-kimurika inyuma: Fotone yibintu byangirika cyane muri silicon. Imiterere-yamurikiwe inyuma yemeza ko fotone nyinshi zinjizwa murwego rwo kwinjiza, kandi electron zabyaye zinjizwa mukarere ka avalanche. Kuberako igipimo cya ionisation ya electron muri silicon kiri hejuru yicy'imyobo, inshinge za electron zitanga amahirwe menshi yo kurwara. Doping indishyi mukarere ka avalanche: Ukoresheje uburyo bukomeza bwo gukwirakwiza boron na fosifore, doping idahwitse yishyurwa kugirango yibande kumashanyarazi mukarere kimbitse hamwe nubusembwa buke bwa kirisiti, bigabanya neza urusaku nka DCR.

2. Inzira yo gusoma cyane. 50V kuzimya amplitude kuzimya Inzibacyuho yihuse ya leta; Igikorwa cya Multimodal: Muguhuza ibimenyetso bya FPGA QUENCHING na RESET ibimenyetso, guhinduranya byoroshye hagati yubusa (signal trigger), gukingira (disiki yo hanze ya GATE), hamwe nuburyo bwa Hybrid buragerwaho.

3. Gutegura ibikoresho no gupakira. Gahunda ya wafer ya SPAD iremewe, hamwe na kinyugunyugu. SPAD ihujwe na substrate ya AlN itwara kandi ihagaritse kuri firime ikonjesha (TEC), kandi kugenzura ubushyuhe bigerwaho binyuze muri thermistor. Multimode optique fibre ihujwe neza na centre ya SPAD kugirango igere ku guhuza neza.

4. Kugenzura imikorere. Calibration yakozwe hifashishijwe 785 nm picosekond pulsed laser diode (100 kHz) hamwe nigihe cyo guhinduranya imibare (TDC, imyanzuro 10 ps).

Incamake

Mugutezimbere imiterere ya SPAD (ihuriro ryimbitse, kumurika-inyuma, kwishyurwa kwa doping) no guhanga umuzunguruko wa 50 V kuzimya, ubu bushakashatsi bwasunitse PDE ya silicon ishingiye kuri disiketi imwe ya fotone igera ku burebure bushya bwa 84.4%. Ugereranije nibicuruzwa byubucuruzi, imikorere yacyo yuzuye yazamuwe cyane, itanga ibisubizo bifatika kubisabwa nko gutumanaho kwa kwant, kubara kwant, no kwerekana amashusho menshi bisaba gukora cyane kandi bikora neza. Uyu murimo washyizeho urufatiro rukomeye rwo kurushaho guteza imbere silikoniicyuma kimweikoranabuhanga.