Imwe mumiterere yingenzi ya moderi optique ni modulisiyo yihuta cyangwa umuvuduko mwinshi, bigomba nibura byihuse nkibikoresho bya elegitoroniki bihari.Transistors ifite inshuro zitambuka hejuru ya 100 GHz yamaze kugaragara muri tekinoroji ya 90 nm silicon, kandi umuvuduko uzagenda wiyongera kuko ingano yimiterere yagabanutse [1].Nyamara, umurongo wa silicon-ishingiye kuri modulator irahari.Silicon ntabwo ifite χ (2) -uburinganire bitewe nuburyo bwa centro-simmetric kristaline.Gukoresha silicon iremereye byatumye habaho ibisubizo bishimishije bimaze [2], ariko kutarenza umurongo ntibiremera ibikoresho bifatika.Moderi igezweho ya silicon Photonic modulator rero iracyashingira kubitwara kubuntu kubuntu muri pn cyangwa pin ihuza [3-5].Imbere ibogamye imbere yerekanwe kwerekana ibicuruzwa birebire bya voltage munsi ya VπL = 0.36 V mm, ariko umuvuduko wo guhinduranya ugarukira kubikorwa byabatwara bake.Nubwo bimeze bityo, ibipimo byamakuru 10 Gbit / s byakozwe hifashishijwe mbere yo gushimangira ibimenyetso byamashanyarazi [4].Ukoresheje guhuza kubogamye aho, umurongo wagutse wongerewe kugera kuri 30 GHz [5,6], ariko ibicuruzwa bya voltagele byazamutse kuri VπL = 40 V mm.Kubwamahirwe make, moderi ya plasma yingirakamaro itanga modulasiyo itifuzwa kimwe [7], kandi basubiza umurongo wa voltage ikoreshwa.Imiterere ihanitse yo guhindura nka QAM isaba, icyakora, igisubizo cyumurongo hamwe nicyiciro cyiza cyo guhindura, bigatuma ikoreshwa ryingaruka za electro-optique (Ingaruka ya Pockels [8]) yifuzwa cyane.
2. Uburyo bwa SOH
Vuba aha, hashyizweho uburyo bwa silicon-organic hybrid (SOH) [9-12].Urugero rwa moderi ya SOH irerekanwa mumashusho 1 (a).Igizwe na slot waveguide iyobora umurima wa optique, hamwe nuduce tubiri twa silicon duhuza amashanyarazi amashanyarazi ya optique na electrode ya metallic.Electrode iherereye hanze yumurima wa optique kugirango wirinde igihombo cyiza [13], Ishusho 1 (b).Igikoresho gishyizwe hamwe nibikoresho bya electro-optique byuzuza icyarimwe.Umuvuduko wa moduline utwarwa nicyuma cyumuriro wamashanyarazi hanyuma ukamanuka hejuru yumurongo tubikesha imirongo ya silicon ikora.Umuriro w'amashanyarazi wavuyemo noneho uhindura indangagaciro yo kugabanuka mumwanya unyuze kuri ultra-yihuta ya electro-optique.Kubera ko ikibanza gifite ubugari muburyo bwa 100 nm, volt nkeya zirahagije kugirango habeho imirima ikomeye ihinduranya iri murwego rwubunini bwimbaraga za dielectric yibikoresho byinshi.Imiterere ifite imikorere ihanitse cyane kuva byombi bigenda bihinduka hamwe na optique imirima yibanze imbere, ishusho 1 (b) [14].Mubyukuri, gushyira mu bikorwa bwa mbere modulator ya SOH hamwe na sub-volt ikora [11] bimaze kugaragara, kandi sinusoidal modulation igera kuri 40 GHz yerekanwe [15,16].Ariko, imbogamizi mukubaka amashanyarazi make-yihuta ya SOH modulator ni ugukora umurongo uhuza cyane.Mumuzunguruko uhwanye nahantu hashobora kugaragazwa na capacitor C hamwe nu murongo uyobora abarwanya R, Ishusho 1 (b).Igihe gikwiranye na RC gihoraho kigena umurongo wigikoresho [10,14,17,18].Kugirango ugabanye guhangana na R, hasabwe kwigana imirongo ya silicon [10,14].Mugihe doping yongerera ubushobozi bwimigozi ya silicon (bityo ikongerera igihombo optique), umuntu yishyura ikindi gihano cyigihombo kuko kugenda kwa elegitoronike kubangamiwe no gukwirakwiza umwanda [10,14,19].Byongeye kandi, ibihimbano biheruka kugerageza byerekanaga bitunguranye bitunguranye.
Beijing Rofea Optoelectronics Co., Ltd iherereye mu Bushinwa “Silicon Valley” - Beijing Zhongguancun, ni ikigo cy’ikoranabuhanga rikomeye cyahariwe gukorera ibigo by’ubushakashatsi mu gihugu no mu mahanga, ibigo by’ubushakashatsi, kaminuza ndetse n’abakozi bashinzwe ubushakashatsi mu bumenyi.Isosiyete yacu ikora cyane cyane mubushakashatsi niterambere byigenga, gushushanya, gukora, kugurisha ibicuruzwa bya optoelectronic, kandi bitanga ibisubizo bishya hamwe na serivise zumwuga, zihariye kubashakashatsi ba siyanse n'abashinzwe inganda.Nyuma yimyaka myinshi yo guhanga udushya, yakoze urutonde rwinshi kandi rwuzuye rwibicuruzwa byamashanyarazi, bikoreshwa cyane mumijyi, igisirikare, ubwikorezi, amashanyarazi, imari, uburezi, ubuvuzi nizindi nganda.
Dutegereje ubufatanye nawe!
Igihe cyo kohereza: Werurwe-29-2023